| 两米光栅——线纹自动测量仪（一） |
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| 中文摘要: |
| 描述了一台能够对长度达１ｍ的线纹尺和长度达２ｍ的光栅尺（线位移传感器）进行测量的激光干涉仪，干涉仪设计成了双干涉光路系统，以消除光栅尺安装引入的阿贝误差，这台测量仪采用干涉条纹计量原理，对光栅尺和线纹尺的线值精度进行检测，并能对光机信号的质量进行评价。测量过程中，对空气折射率实现了实时修正。 |
| 英文摘要: |
| This paper describes the laser interferometer which can measure automatically both the1ength gratings up to 2m (grating linear displacement sensors) and the line standards up to 1m. Theinterferometer was designed according to the Appensfein principle which can offset the Abbe Errorcaused by the method of fitting the length grating during measuring it. The length of the line standardsand the length gratings using fringe counting theory can be measured, and also the quality parameters ofgrating signal with this instrurnent be analyzed. ln the course of measurement, the refractive index ofthe air around the interferometer was corrected real time. |
| 牛立新 任冬梅 |
| 北京市长城计量测试技术研究所!北京市，100095 |
| 中文关键词: 光栅线 位移传感器 线纹尺 干涉仪 计量光栅 |
| 英文关键词:Length grating, Grating linear displacement sensor, Line standard, Measurement,Laser interferometer |
| 基金项目: |
| DOI： |
| 引用本文：牛立新,任冬梅.两米光栅——线纹自动测量仪（一）[J].计测技术,1997,(5):3~5. |
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