| 薄膜热电偶热电特性分析与试验 |
| Thermo-electric Property Analysis and Experiment of Thin-film Thermocouple |
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| 中文摘要: |
| 薄膜热电偶具有体积小?操作简便?准确度高等优点,在精确测温领域显出了极大优势?采用磁控溅射法生产的热电偶在材料组合上几乎是无限的?本文对NiCr∕NiSi 薄膜热电偶?NiCrSi∕NiSiMg 薄膜热电偶静态下的重复性?使用寿命?温度上限等进行对比?分析,以便在使用中可以更好地“因地制宜”? 与大连某高校制作的薄膜热电偶进行对比试验,验证制作工艺对薄膜热电偶性能的重要影响?薄膜热电偶作为一种新型热电偶在发动机叶片等特殊部件表面测温领域具有广泛的应用前景? |
| 英文摘要: |
| Thin-film thermocouples have advantages of small volume,simplicity of operation,high accuracy,etc.? In some special cases for accurate temperature measurement,they show the great advantage.By means of magenetron sputtering method in the production ofthermocouples,the material composition possibilities are almost unlimited.In this article, the NiCr∕NiSi thinˉfilm thermocouple is compared to the NiCrSi∕NiSiMg thin-film thermocouple in terms of static repeatability,service life and temperature limit,in order to better adjust measures to local conditions.And a compare test was done with a thin-film thermocouple produced by a university in Dalian,verifying the important role of the process on the properties of thin-film thermocouples.Thin-film thermocouples as a new type of thermocouples have a wide application prospect for surface temperature measurement of engine blades and other special parts.? |
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| 中文关键词: 薄膜热电偶 材料 工艺 表面测温 |
| 英文关键词:Thin-film thermocouple material process surface temperature measurement |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2017.02.08 |
| 引用本文：张轩铭,王毅,常蕾.薄膜热电偶热电特性分析与试验[J].计测技术,2017,37(2):32~36. |
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