| 基于干涉法的非球面测量技术 |
| Interferometric Testing of Aspheric Surface |
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| 中文摘要: |
| 随着光学精密加工技术的发展，非球面光学元件在各种光学系统中广泛应用。高精度非球面检测技术对非球面光学元件的发展意义重大。论述了基于干涉法的非球面面形误差检测技术? 根据检测原理，分别对零位干涉检验法与非零位干涉检验法进行了详细介绍，概述了近年来主流的非球面检测技术现状，展望了非球面面形检测技术的发展趋势。 |
| 英文摘要: |
| With the development of optical precision manufacturing technology，aspheric optical components are widely used in various optical systems.Therefore,high-precision aspheric surface measurement technology is of great significance to aspheric optics manufacture.This paper introduces the aspheric surface testing technique based on interference method.According to the principle of measurement,the null testing and the non-null testing are introduced in detail.Then it summarizes the current situation and the development trend of aspheric testing technology. |
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| 中文关键词: 非球面检测 干涉检测 零位检验法 非零位检验法 |
| 英文关键词:aspheric surface testing null testing non-null testing |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2018.01.01 |
| 引用本文：郝群,宁妍,胡摇.基于干涉法的非球面测量技术[J].计测技术,2018,38(1):. |
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