| 真空腔泄漏对振动筒压力传感器长期稳定性的影响分析 |
| Analysis of the Leaking of Vacuum Cavity Effecting on Long-term Stability of a Vibration Cylinder Pressure Sensor |
| |
| HTML 查看全文 查看/发表评论 下载PDF阅读器 |
| 中文摘要: |
| 针对高精度绝压振动筒压力传感器的测量压力原理，提出传感器对真空度的要求。介绍真空腔的设计方法和真空度的测试方法。从漏率的角度分析了真空腔泄漏对传感器长期稳定性和测量精度的影响，最终给出传感器真空腔设计依据和传感器存储使用要求。 |
| 英文摘要: |
| The theory of measuring the sensor′s pressure was discussed and the requirement of the vacuum degree for the sensor was proposed. The design method of vacuum cavity and the test method of vacuum degree were given out. The effect of different vacuum cavity′s leaking on the sensor′s long-term stability and measurement accuracy was analyzed. At last, we also need to think about the way on how to design the vacuum cavity and the storage methods and the using environment of the sensor. |
|
| 中文关键词: 绝压传感器 真空腔 漏率 稳定性 |
| 英文关键词:absolute pressure sensor vacuum cavity the speed of leaking stability |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2018.01.04 |
| 引用本文：陈丽艳,康志宏,宋继红.真空腔泄漏对振动筒压力传感器长期稳定性的影响分析[J].计测技术,2018,38(1):. |
| 关闭 |
