| 等倾与相移两种干涉仪的平面度绝对测量比对 |
| Comparison of Absolute Measurement of Flatness Using Isoclinic Interferometer and Phase-shifting Interferometer |
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| 中文摘要: |
| 采用三平面互检测量方法，分别在等倾干涉仪和相移干涉仪上对平晶平面度进行了绝对测量比对。针对两种干涉仪不同的测量原理，提出了一种规范方法以从相移干涉仪数十万点阵测量数据中，提取符合等倾干涉仪测量数据格式的结果；对比等倾干涉仪的结构与环境控制方法，研究了相移干涉仪进行平面度绝对检验过程中的温度、温度梯度、温度分层情况，采取双重保温措施下达到了0.002 μm的测量重复性，和0.01 μm的绝对检验测量不确定度。与等倾干涉仪的检定结果的差异小于0.01 μm，确定了相移干涉仪用于平晶的平面度检定工作可行性。 |
| 英文摘要: |
| Based on the method of three-flat testing, the comparison of flatness measurements by two kinds of instruments which are isoclinic interferometer and phase shift interferometer was given. With the study of the principles of two kinds of interferometers, a standard process was put forward to extract a few figures from the lattice data tested by phase shift interferometer to fit the data format from isoclinic interferometer. Compared to the structure and environmental control method of isoclinic interferometer, the temperature, temperature gradient and temperature stratification during the absolute measurement of flatness using the phase-shifting interferometer were researched, and the double insulation structure of the cavity of phase-shifting interferometer was applied. The measurement repeatability was 0.002 um, and the uncertainty of absolute measurement was 0.01 um. , The difference from the measurement result of isoclinic interferometer was less than 0.01 um，which illustrates the feasibility of the phase-shifting interferometer used for the flatness verification. |
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| 中文关键词: 平面度 相移干涉仪 等倾干涉仪 三平面互检 |
| 英文关键词:flatness phase-shifting interferometer isoclinic interferometer three-flat test |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2018.02.07 |
| 引用本文：王青，顾洋.等倾与相移两种干涉仪的平面度绝对测量比对[J].计测技术,2018,38(2):. |
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