| 频闪白光干涉技术 |
| Stroboscopic white light interferometry (SWLI) |
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| 中文摘要: |
| 频闪白光干涉技术（SWLI）能够对被测系统进行动态模式的重建和表征，在微机电系统（MEMS）或微光机电系统（MOEMS）等振动样品测量中具有很高的实用性。传统频闪方法不能预先检测或分析具有单个振动激励源的微结构，而频闪白光干涉技术则解决了这一问题。为了全面了解这一新开发的技术，本文介绍了理论、技术方法和该技术各种应用的实验结果及分析。该技术为MEMS、MOEMS甚至微纳尺度生物体动态行为的重建和分析提供了一种有效的方法。实验结果和分析表明所开发的技术在实际应用中具有良好的可行性和准确性。 |
| 英文摘要: |
| Stroboscopic white light interferometry (SWLI) has been known as a useful measurement technique for vibrating samples such as micro electro mechanical systems (MEMS) ormicro-opto-electro-mechanical systems (MOEMS) because it enables dynamic mode reconstruction and characterization of the tested system. The technique has been extended to measure a microstructure having an individual vibrating excitation source which cannot be detected or analyzed in advance by the traditional stroboscopic method. To provide a comprehensive insight into this newly developed technique, this chapter presents the theory, technical methodology and experimental results as well as analyses of the techniques for various applications. The technology provides an effective method in reconstructing and analyzing dynamic behavior of MEMS, MOEMS or even bio-objects in a micro- or nano-scale. Some experimental results and analyses have been provided to verify the feasibility and accuracy of the developed techniques with respect to various applications. |
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| 中文关键词: 白光干涉法 动态测量 频闪白光干涉法（SWLI） 微机电系统（MEMS） 微光机电系统（MOEMS） |
| 英文关键词:white light interferometry, dynamic measurement, stroboscopic white light interferometry (SWLI), micro electro mechanical systems (MEMS), micro-opto-electro-mechanical systems (MOEMS). |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2018.03.01 |
| 引用本文：陈亮嘉.频闪白光干涉技术[J].计测技术,2018,38(3):. |
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