| 第三代激光干涉仪 |
| Third-generation Laser Interferometer |
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| 中文摘要: |
| 微片激光自混合干涉仪原理上与迈克尔荪干涉仪不同。主要差别是：激光自混合干涉仪的光束照射在被测物上并被反射回激光器被激光器内放大介质放大。作者课题组研究的的激光自混合干涉仪的测量速度达到了1 m/s以上，10 m空程的环境误差小到了40 nm。它具有全固态，可测“黑”目标的位移等性能，又达到了传统激光干涉仪的技术指标。如果第一代光学干涉仪是以光谱灯做光源，第二代光学干涉仪是以HeNe气体激光器做光源的话，固体激光自混合干涉仪因其激光“自混合”原理可看成是第三代激光干涉仪。 |
| 英文摘要: |
| The microchip laser self-mixing interferometer is different from the Michelson interferometer in principle. The main difference is that the beam of the laser self-mixing interferometer is amplified by the amplifying medium in the laser after it has been irradiated on the object to be measured and reflected back. The laser self-mixing interferometer developed by the author's research group has achieved a measurement speed of more than 1 m/s, and the environmental error was as small as 40 nm for an air path of 10 m. It has all solid state, can measure the displacement of "black" target, and has reached the technical index of the traditional laser interferometer. If the optical interferometer using a spectral lamp as light source is considered as the first-generation interferometer and that using He-Ne laser as the second-generation interferometer, the solid laser self-mixing interferometer can be regarded as the third-generation laser interferometer because of its laser "self mixing" principle. |
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| 中文关键词: 固体微片激光器 激光自混干涉仪 Lang-Kobayash模型 仪器化 位移测量 |
| 英文关键词:solid microchip laser laser self-mixing interferometer Lang-Kobayash model instrumentation displacement measurement |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2018.03.03 |
| 引用本文：张书练.第三代激光干涉仪[J].计测技术,2018,38(3):. |
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