| 三坐标测量机微纳探头的设计与验证 |
| Design and Verification of Micro/nano-probes for Coordinate Measuring Machine |
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| 中文摘要: |
| 介绍了国内外测量探头的研究现状；设计了基于簧线和簧片的弹性机构，建立了典型结构：弹性机构的刚度模型，对不同形状的弹性机构进行了仿真验证；介绍了作者团队研制的几种光学传感器及八款三坐标测量机微纳探头，对探头的性能进行了实验验证与测试；对三坐标测量机微纳测量探头的研究和发展趋势进行了总结和展望。 |
| 英文摘要: |
| The recent progress of probes for coordinate measuring machine(CMM) was reviewed. The elastic mechanisms for the probes based on elastic strings and leaf springs have been designed. A typical structure, the stiffness model of the elastic mechanism was established. The elastic mechanisms with different shapes have been verified by simulation using ANSYS software. Several kinds of optical sensors and eight micro/nano probes of CMM developed by the author’s team were introduced. The performance of the probes were verified by experiment and tested. Finally, the research and development trends of the micro/nano probes for CMMs were summarized and prospected. |
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| 中文关键词: 计量学 微纳米三坐标测量机 探头 |
| 英文关键词:metrology micro/nano CMM probe |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2018.03.04 |
| 引用本文：范光照1,2，李瑞君2.三坐标测量机微纳探头的设计与验证[J].计测技术,2018,38(3):. |
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