| 一种基于法布里-珀罗干涉仪的位移测量方法 |
| A Displacement Measurement Method Based on Fabry-Perot Interferometry |
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| 中文摘要: |
| 介绍了一种基于法布里-珀罗干涉仪的位移测量方法，为了克服通常的法布里-珀罗干涉仪在位移测量范围方面的局限，采用两束可调激光分别对法布里-珀罗腔的两个相邻谐振峰的光频率进行追踪测量，能够得到任意时刻法布里-珀罗腔的长度，从而实现对测量镜位移的测量，测量范围可以达到毫米量级。对影响测量准确度的主要因素进行了简要分析，结果表明采用本方法能够实现纳米级准确度位移测量。 |
| 英文摘要: |
| A displacement measurement method based on Fabry-Perot interferometer is introduced. In order to overcome the limit in displacement measurement range of usual Fabry-Perot interferometer, the length of the Fabry-Perot cavity is measured by tracing the frequencies of two adjacent resonance peaks using two frequency-tunable lasers, and the displacement of the measurement mirror can be determined by the length change of Fabry-Perot cavity. The measurement range can be expanded to millimeter level by using this method. The main factors that affect the measurement accuracy are analyzed briefly and the result shows that the displacement measurement accuracy of nanometer level can be achieved. |
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| 中文关键词: 法布里-珀罗干涉仪 多光束干涉 位移测量 测量不确定度 |
| 英文关键词:Fabry-Perot interferometer multi-beam interferometry displacement measurement measurement uncertainty |
| 基金项目: |
| DOI：10.11823/hkjcjs.1674-5795.2018..04.006. |
| 引用本文：任冬梅，朱振宇，段小艳，李华丰，万宇.一种基于法布里-珀罗干涉仪的位移测量方法[J].计测技术,2018,38(4):. |
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