| TRIZ理论在真空热处理测量装置研究中的应用 |
| Application of TRIZ Theory in Vacuum Heat Treatment Measurement Device |
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| 中文摘要: |
| 在真空热处理测量装置中，传统的四极质谱计由于结构缺陷存在残余气体检测不充分的问题，而标准真空计和被校真空计之间使用的T型三通同样由于结构问题存在真空度检测效率低的问题，导致大容量真空炉的真空度和残余气体测不准。文章从TRIZ理论方法的角度出发，对传统的四极质谱计结构进行不对称式优化，将T型三通变为球面结构并作加热和气压控制改进。优化和改进提高了真空热处理测量装置的工作效率。 |
| 英文摘要: |
| In the vacuum heat treatment unit, the traditional quadrupole mass spectrometer (QMS) has the problem of inadequate residual gas detection due to structural defects, and the connector between the standard vacuum gauge and the vacuum gauge to be calibrated also has low vacuum detection efficiency due to structural problems, which leads to the inaccurate measurements of vacuum degree and residual gas in the large-capacity vacuum furnace. This article starts with TRIZ theory to make an asymmetric optimization of the structure of QMS, and transforms the T-shaped structure into a spherical structure and improves the heating and pressure control. The efficiency of vacuum heat treatment measuring device has been improved by the optimization and improvement. |
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| 中文关键词: 真空热处理装置 球型校准室 四极质谱计 TRIZ理论 |
| 英文关键词:vacuum heat treatment unit spherical calibration room quadrupole mass spectrometer TRIZ theory |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2019.01.04 |
| 引用本文：吴镇沅.TRIZ理论在真空热处理测量装置研究中的应用[J].计测技术,2019,39(1):. |
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