| 用于微球球度测量的双SPM测头对准系统 |
| Dual SPM Probe Alignment System for Measuring Sphericity of Microspheres |
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| 中文摘要: |
| 压电微音叉与钨探针结合，构成SPM（扫描探针显微镜）的扫描测头。将双测头对称置于微球的赤道圆截面处，构成微球球度差动测量系统。通过视觉引导系统对双测头进行粗对准，用视频显微镜对微球和测头分别聚焦，拍摄多组照片，然后对对准图像进行小波分析边缘检测及多图像融合处理，再将图像处理结果反馈到系统进行精确对准。在实际实验中，获得了该对准方法下微球赤道圆截面的测量结果，并分析了对准误差对系统测量结果带来的影响。 |
| 英文摘要: |
| The piezoelectric tuning fork is combined with tungsten probe to form a scanning probe of SPM. The double probe is symmetrically placed at the equatorial circle cross section of the microsphere to form a microsphere sphericity differential measurement system. The dual probes are roughly aligned by a visual guidance system. The microsphere and probes are focused by video microscopy, and multiple groups of photos are taken. Then the aligned images are processed by wavelet analysis edge detection and multi-image fusion, and the image processing results are fed back to the system for accurate alignment. In the actual experiment, the measurement results of the equatorial circle cross section of the microsphere under the alignment method are obtained, and the influence of alignment error on the system measurement results is analyzed. |
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| 中文关键词: 扫描测头 差动测量 对准系统 小波分析 图像融合 |
| 英文关键词:scanning probe differential measurement alignment system wavelet analysis image fusion |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2019.01.05 |
| 引用本文：芈梦，丁鹏翔，方传智，王超群，陈丽娟，黄强先.用于微球球度测量的双SPM测头对准系统[J].计测技术,2019,39(1):. |
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