| 确定纳米压入面积函数的改进方法 |
| An Improved Method for Determining Nanoindentation Area Function |
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| 中文摘要: |
| 针对薄膜等微小结构材料力学性能测试中面积函数测量问题，提出了一种改善微小压入深度下压头面积函数准确性的方法。该方法将压头与被测样品之间的投影接触面积与压头针尖曲率半径和角度相关联，解决常用的面积函数确定方法在50 nm以下浅压痕测量中不可靠的问题。经实验验证，该面积函数确定方法，可以提高微小接触深度下压入硬度和折合模量的测量准确度。 |
| 英文摘要: |
| In order to reduce the influence of inaccurate area function to the measurement results of mechanical properties of thin-film and other micro-sized materials, a method to improve the accuracy of the indenter area function at small indentation depth is proposed. This method links the projected contact area between the indenter and the sample with the tip radius and angle of the indenter, which can improve the reliability of the commonly used area function determination method in the measurement of shallow indentation below 50 nm. The experimental results show that the measurement accuracy of indentation hardness and reduced modulus at a small contact depth can be improved by using this area function determination method. |
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| 中文关键词: 面积函数 纳米压入 压头形状 压入硬度 测量 |
| 英文关键词:area function nanoindentation indenter shape indentation hardness measurement |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2021.02.10 |
| 引用本文：李强，任冬梅，万宇.确定纳米压入面积函数的改进方法[J].计测技术,2021,(2):. |
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