| 微压力标准装置研制 |
| Design and Development of Micro Pressure Standard Device |
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| 中文摘要: |
| 详细介绍了一种液体压力计微压标准装置的研制，采用超声波液位定位技术实现液位准确定位，并采用激光干涉技术实现了液柱高度准确测量，同时对温度控制、位移控制、数据采集处理等分系统设计进行介绍，最后对微压标准装置进行了测量不确定度分析和验证，该标准装置填补国防系统5 kPa以下微压量值传递空白，解决国防系统高准确度微压仪器仪表的溯源问题。 |
| 英文摘要: |
| This paper introduces in detail the development of a micro pressure standard device for liquid pressure gauge calibration. Using ultrasonic liquid level positioning technology to realize accurate liquid level positioning, the height of liquid column is accurately measured by laser interference technology. At the same time, the temperature control, displacement control, data acquisition and processing subsystem design are introduced. Finally, the measurement uncertainty of the micro pressure standard device is analyzed and verified. The standard device fills the nonexistence of the standard below 5kPa micro pressure value and solves the traceability problem of high accuracy micro pressure instruments in national defense system. |
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| 中文关键词: 微压力 校准 压力标准装置 液体压力计 |
| 英文关键词:micro pressure calibration pressure standard device liquid manometer |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2021.02.27 |
| 引用本文：李鑫武.微压力标准装置研制[J].计测技术,2021,(2):. |
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