| 微压压力传感器的结构改进 |
| Evolution of Diaphragm Structure for low Range Pressure Transducers |
| |
| HTML 查看全文 查看/发表评论 下载PDF阅读器 |
| 中文摘要: |
| 硅压力传感器具有小型和高灵敏等的优点，近年来小型高灵敏度的压力传感器的量程已低到１ｋＰａ。在这一发展过程中硅弹性体结构的改进起了很大的作用，本文介绍了作者首先提出了适用于微压压力传感器的梁膜（岛）结构以及以后几年来出现的相近的结构，用这些结构都已制成量程为１ｋＰａ的压力传感器 。 |
| 英文摘要: |
| Silicon pressure transducers feature miniaturization and high sensitivity. The pressurerange for nimiature pressure transducers has been as low as 1 kPa by now. In the development of highsensitivity pressure transducer,the inprovement of diaphragm structure has been playing an importantrole. lntroduced in this paper is the beam-diaphragm (island)structure, first proposed by the authors in1989. Also introduced are two similar structures proposed by TUB and Honeywell in 1993 and 1992,respectively. 1 kPa pressure range has been achieved by all these three structure. |
| 鲍敏杭 沈绍群 |
| 复旦大学电子工程系!上海市，200433 |
| 中文关键词: 微压 压力传感器 结构 传感器 |
| 英文关键词:Low pressure range, Pressure transducer, structure |
| 基金项目: |
| DOI： |
| 引用本文：鲍敏杭,沈绍群.微压压力传感器的结构改进[J].计测技术,1995,(5):6~8,32. |
| 关闭 |
|
|
|
