| 高分辨率光电尺寸检测系统研究 |
| Research on Optoelectronic Dimension Measuring System with High Resolution |
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| 中文摘要: |
| 论述了高分辨率光电尺寸检测系统的工作原理和系统总体结构，并给出了设计要点和提高系统分辨率的途径，本系统具有高速，高精度，非接触在线检测，测量结果直接数字显示和打印等特点。 |
| 英文摘要: |
| This paper introduces the operating principle and total structure of the optoelectronicdimension measuring system with high resolution. The key points of its design and the methods forimproving system resolution are given. There are many features, such as high speed, high accuracy,non contract and on-line measurement, digital display and directly printing the results measured, in the system. |
| 张国玉 安志勇 |
长春光学精密机械学院光电技术与工艺工程研究所!吉林省长春市，130022(张国玉，安志勇，曹维国)
，长春光学精密机械学院光电技术与工艺工程研究所!吉林省长春市(李成志)
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| 中文关键词: 分辨率 光电检测 系统 尺寸检测 |
| 英文关键词:Resolution, Optoelectronic measurement, System, |
| 基金项目: |
| DOI： |
| 引用本文：张国玉,安志勇.高分辨率光电尺寸检测系统研究[J].计测技术,1996,(2):6~9. |
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