| 激光外差干涉仪光电信号处理方法及特点 |
| Methods and Characteristics of Opto-Electrical Signal Processing of Laser Heterodyne Interferometer |
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| 中文摘要: |
| 叙述和分析了外差激光干涉光电信号处理主其特点，指出了它们各自的应用范围，同时介绍了一处新型的光电信号处理方法，它不仅使外差干涉仪用于动态测量，而且可以同时实现高分辩率测量 。 |
| 英文摘要: |
| Methods and characteristics of opto- electrical signal processing of heterodyneinterferometer are described and analysised in this paper. Their applying fields are showed. At the sametime a new opto-electrical processing method is introduced. With the new method the heterodyneinterferometer can not onlu be used to measure dynamically. but also reach to a high measurementtesolution. |
| 赵洋 李达成 |
| 清华大学精密仪器与机械学系!北京市，100084，清华大学精密仪器与机械学系!北京市，100084 |
| 中文关键词: 外差干涉 相位测量 信号处理 光电信号 |
| 英文关键词:Heterodyne interferoment, Phase measurement, Signal processing, Frequency demodulation |
| 基金项目:国家自然科学基金 |
| DOI： |
| 引用本文：赵洋,李达成.激光外差干涉仪光电信号处理方法及特点[J].计测技术,1996,(6):7~9. |
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