| Wollaston棱镜方位对激光干涉测量精度的影响 |
| Influence of Orientation of Wollaston Prism on Accuracy of Laser Interference Measuring System |
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| 中文摘要: |
| 在双频激光干涉测量系统中，Ｗｏｌｌａｓｔｏｎ棱镜是不可缺少的重要光学元件，它可将双频激光按偏振方向分为测量光和参考光，从而实现高精度测量；但是，如果Ｗｏｌｌａｓｔｏｎ棱镜的安装方位相对入射光线方向以及与聚集透镜距离不同时，测量结果将会不同。本文结合表面粗糙度激光测量系统，从理论上定量分析了Ｗｏｌｌａｓｔｏｎ棱镜的安装方位对测量精度的影响。 |
| 英文摘要: |
| In dual-frequency laser interference measuring system Wollaston prism is anindispensable and important device,which can separate the incident beam in to measurement beam andreference beam according to the polarization direction of dual-frequency laser,so as to realize the highaccuracy measurement. But if the installation orentation of Wollaston prism relative to the incident beamand the distance between the prism and the focus lens are different. The measurement result will bedifferent. In this paper,combining with the surface roughness laser measuring system,the influence ofthe orientation of Wollaston prism on accuracy of measurement is analyzed in theory and quantitatively. |
| 张琢 刘丽华 于瀛洁 李鹏生 |
| 哈尔滨工业大学机电工程学院!黑龙江省哈尔滨市，150001 |
| 中文关键词: 棱镜 方位 精度 激光干涉测量 粗糙度 |
| 英文关键词:Wollaston prism, Orientation, Accuracy |
| 基金项目: |
| DOI： |
| 引用本文：张琢,刘丽华,于瀛洁,李鹏生.Wollaston棱镜方位对激光干涉测量精度的影响[J].计测技术,1999,(1):4~7. |
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