| 可调姿态一维运动平台 |
| Posture Variable One-dimension Platform |
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| 中文摘要: |
| 使用“大范围纳米测量机”进行扫描测量时，要求被测样品的空间姿态相对测量坐标系稳定，因此需要样品姿态小范围内动态可调。本文提供一种姿态可调的一维运动平台解决方案：利用四个压电陶瓷电机驱动空间上均布的四个丝杠，通过柔性连接器共同推动运动平台。压电陶瓷电机的协调运动可以实现运动平台的大范围升降运动及小范围姿态调整，其自保持能力可以减小驱动部件发热对纳米级测量的影响；四点过定位支撑利于简化控制模型，还可提高工作台的稳定性。 |
| 英文摘要: |
| Large scale nano-measurement system requires the posture of samples to be stable during large scale scanning measurement. This means the sample’s posture should be adjustable. A posture variable one-dimension platform is provided in this paper. Four pivots driven by piezoceramics linear motors were used in the system to sustain the platform, and the connectors of pivots and platform are flexible. Under the control of four-axis simultaneous motion controller, four pivots rotate synchronously. When pivots are rotating at the same speed, the platform will be in translational move. And when the speeds are different, the posture will change. In this way, we got a platform whose range of movement is 40mm with a resolution of movement of 0.2 μm, and the range of posture is 0.1o with a resolution of rotation of 0. 1". |
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| 中文关键词: 姿态调整 一维运动平台 四点支撑 |
| 英文关键词:posture variable one-dimension platform four pivots driven |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2015.03.06 |
| 引用本文：李华丰,朱振宇,兰一兵,李强,王霁.可调姿态一维运动平台[J].计测技术,2015,35(3):. |
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