| 基于TDLAS的压力测量技术 |
| Pressure Measurement Technology Based on TDLAS |
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| 中文摘要: |
| 流体介质的分子吸收光谱谱线与介质的本身的物理属性有关，蕴含信息丰富，且具有高灵敏度、响应快、抗干扰能力强等优点。结合可调谐二极管激光吸收光谱技术的压力测量方法是压力真空计量的新思路。本文分析了基于可调谐二极管激光吸收光谱法测量压力的基本原理，重点介绍了直接吸收法和波长调制法，并比较了其各自的优缺点。梳理了近年国内外的主要研究进展及应用情况，在此基础上，总结了基于TDLAS的压力测量技术目前面临的关键技术瓶颈，并对其未来主要应用领域进行了展望。 |
| 英文摘要: |
| Molecular absorption spectrum of fluid medium is related to the physical properties of itself，which contain abundant information and have the advantages of high sensitivity, fast response and strong anti-interference ability. The pressure measurement method combined with tunable diode laser absorption spectroscopy is a new idea of pressure and vacuum metrology. In this paper, the basic principle of measuring pressure based on tunable diode laser absorption spectroscopy is analyzed. The direct absorption spectroscopy and wavelength modulation spectroscopy are introduced, and their advantages and disadvantages are compared. The main research research advances and applications at home and abroad in recent years are reviewed. On this basis, the key technical bottlenecks of pressure measurement technology based on TDLAS are summarized, and the main application fields in the future are prospected. |
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| 中文关键词: 可调谐二极管激光吸收光谱技术 压力与真空计量 气体压力 |
| 英文关键词:TDLAS pressure and vacuum metrology gas pressure |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2019.03.02 |
| 引用本文：宫学程，杨军.基于TDLAS的压力测量技术[J].计测技术,2019,39(3):. |
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