| 垂直耦合悬空型氮化硅微盘光学传感器 |
| Vertically Coupled Suspended Silicon Nitride Microdisk Based Optical Sensor |
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| 中文摘要: |
| 提出了一种垂直耦合型悬空氮化硅微盘谐振型传感器，该传感器由一个底部非悬空的接入波导和一个顶部悬空的微盘腔组成，实验证明了其具有较高的器件灵敏度和良好的机械稳定性。对于半径40 μm的微盘，在1548.98 nm谐振波长下可以实现超过104的品质因数以及大小适中、 5.66 nm的自由光谱范围。该传感器的灵敏度可通过覆盖不同的有机液体来测量，实验测得值约为554 nm/RIU。该三维传感器的制备与传统的光刻工艺相兼容，利于大批量低成本生产，同时凭借器件尺寸小、工艺简单、检测灵敏度高、响应快、免标记等特点，其在国防安全、生物检测和环境监测等方面具有广阔的应用前景。 |
| 英文摘要: |
| A vertically coupled suspended silicon nitride resonator sensor is experimentally demonstrated, which consists of a bottom-layer un-suspended access waveguide and a top-layer suspended microdisk cavity. The presented sensor can realize a high device sensitivity with a good mechanical stability. For a 40-μm-radius disk, more than 104 quality factor at a wavelength of 1548.98 nm can be obtained with a moderate free-spectral range of 5.66 nm. The device sensitivity is measured with covering different organic liquids, and the sensitivity is about 554 nm/RIU. The fabrication of the proposed three-dimensional sensor is compatible with conventional photolithography process, which would benefit its optical sensing applications. |
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| 中文关键词: 光学微腔 悬空型微盘 集成光学 传感器 |
| 英文关键词:Optical Microcavity, Suspended Microdisk, Integrated Photonics, Sensors |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2019.04.05 |
| 引用本文：冉纲林1，顾昌林2，仲路铭2，张福领3，武腾飞4，冯吉军2*.垂直耦合悬空型氮化硅微盘光学传感器[J].计测技术,2019,39(4):. |
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