| MEMS惯性传感器现状与发展趋势 |
| Research Status and Development Trend of MEMS Inertial Sensor |
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| 中文摘要: |
| 自上世纪90年代以来，针对MEMS惯性器件的研究也越来越多，MEMS惯性传感器开始得到了广泛的商业应用.本文对部分MEMS惯性传感器国内外的新近研究成果进行了分类与归纳，分别对MEMS加速度计、MEMS陀螺仪和微惯性测量组合以及惯性微系统进行了研究与分析，对MEMS惯性传感器发展趋势进行了初步推断，认为未来MEMS惯性传感器的发展主要有四个方向：高精度，以满足日益精细化、智能化的应用需求；微型化，以实现便携、分布式应用要求；高集成度，以完成多种功能高密度组合；适应性强，以适应复杂应用环境，拓宽应用范围。 |
| 英文摘要: |
| Since the 1990s, study of MEMS inertial device became more and more popular.MEMS inertial sensors began to get a wide range of business applications . In this paper, some recent research results at home and abroad are classified and summarized, respectively for MEMS acceleration sensor, MEMS gyroscope ,MIMU(Micro Inertial Messurement Unit)and inertial microsystem of literature review and analysis, and get the conclusion of MEMS inertial sensor development trend, the future development of MEMS inertial device mainly has four directions: high precision, to adapt to the application requirements of higher precision and intelligent technology;Miniaturization for portable equipment installation; High integration to achieve multiple functional integration;High adaptability, to adapt to complex environment, to broaden the scope of application. |
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| 中文关键词: MEMS 惯性 传感器 现状 趋势 |
| 英文关键词:MEMS inertia sensors status trend |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2019.04.06 |
| 引用本文：卞玉民1，胡英杰2，李博1，徐淑静1，杨拥军1.MEMS惯性传感器现状与发展趋势[J].计测技术,2019,39(4):. |
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