| 共聚焦激光扫描显微镜在微小硬度压痕测量中的应用研究 |
| Application of Confocal Laser Scanning Microscope in Microvickers Hardness Indentation Measurement |
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| 中文摘要: |
| 尝试将共聚焦激光扫描显微镜应用于微小硬度压痕的测量中，不仅可以得到硬度压痕的三维形貌，而且利用共聚焦测量方法高分辨力的特点，解决了小于20μm的微小硬度压痕无法测量的难题；本文给出了测量微小硬度压痕的方法，并给出了具体步骤和实例；用所得到的压痕的三维形貌表征材料在压入过程中在压头周围所产生的堆积，可以扩展硬度测量的尺度，对于硬度测量的下一步发展具有积极的指导意义。 |
| 英文摘要: |
| This paper attempts to apply confocal laser scanning microscope to the measurement of microvickers hardness indentation, which can not only obtain the three-dimensional shape of indentation, but also solve the problem that indentation less than 20 μm cannot be measured by using the characteristics of high-resolution of confocal measurement method. In this paper, the method，steps and examples of indentation measurement are given. The three-dimensional shape of the indentation can be used to characterize the accumulation of materials around the indenter during the pressing process, which can expand the scale of hardness measurement, and has a positive guiding significance for the next development of hardness measurement. |
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| 中文关键词: 计量学 激光扫描共聚焦显微镜 微小硬度压痕 测量 应用研究 |
| 英文关键词:metrology confocal laser scanning microscope microvickers hardness indentation measurement applied research |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2019.06.09 |
| 引用本文：李杨，张凯林，石伟.共聚焦激光扫描显微镜在微小硬度压痕测量中的应用研究[J].计测技术,2019,39(6):. |
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