| 温度对石墨烯膜光纤F-P声压传感器灵敏度影响研究 |
| Effect of Temperature on Sensitivity of Optical Fiber Fabry-Perot Acoustic Sensor with Graphene Diaphragm |
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| 中文摘要: |
| 石墨烯具有优异的机械、电学与光学等传感特性, 有希望成为下一代可穿戴电子设备的功能敏感材料。石墨烯膜Fabry-Perot（F-P）声压传感器具有高灵敏度、小型化和抗电磁干扰等优点，但会受到温度漂移的影响。温度对传感器的影响主要体现在F-P腔长变化，引起工作点漂移，导致传感器光学灵敏度发生变化；，以及改变石墨烯膜预应力。本文制备了石墨烯膜光纤F-P声压传感器探头，通过声压测试表明，温度改变了悬浮石墨烯膜的机械力学特性，在1 kHz处使其机械灵敏度由1.80 nm/Pa提高至2.44 nm/Pa。 |
| 英文摘要: |
| Due to its excellent mechanical, electrical and optical sensing properties, graphene is expected to become a functional sensitive material for the next generation of wearable electronic devices. Although graphene-based optical fiber Fabry-Perot (F-P) acoustic sensor has the advantages of high sensitivity, miniaturization and anti-electromagnetic interference, it will be affected by temperature drift. The influence of temperature on the sensor mainly changes the F-P cavity length, thereby causing the working point drift and then the change in the optical sensitivity of the sensor. Also, the prestress of graphene film is adjusted. In this paper, an optical fiber F-P acoustic sensor using graphene diaphragm was fabricated and then acoustic test demonstrated the change of mechanical properties of suspended graphene diaphragm, thus achieving the increase of the mechanical sensitivity from 1.80 nm/Pa to 2.44 nm/Pa at 1 kHz. |
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| 中文关键词: 石墨烯 F-P声压传感器 温度影响 灵敏度 |
| 英文关键词:graphene F-P acoustic sensor temperature effect sensitivity |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2020.01.06 |
| 引用本文：尹浩腾1，李成1, 2，宋学锋3，樊尚春1.温度对石墨烯膜光纤F-P声压传感器灵敏度影响研究[J].计测技术,2020,(1):. |
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