| 激光对中仪校准装置及校准方法的研究 |
| Research on Calibration Device and Method of Laser Alignment Instrument |
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| 中文摘要: |
| 目前激光对中仪校准主要采用的方法为垫量块法，但是该方法存在操作复杂、工作效率低、可靠性不高等缺点。针对激光对中仪校准问题,本文提出了一种集光束对准与二维定位误差校准于一体的激光对中仪快速校准方法,并研制了的相应的校准装置。所研制的。该装置采用激光头固定器安装对中仪的被测单元，利用光栅式二维移动平台改变被测单元位置，通过三维回零偏置转台安装和调整对中仪的基准单元，利用自研的光栅数显表实时观测和显示X、Y轴位置及状态信息。该校准装置测量范围为40 mm×40 mm，测量扩展不确定度为3.2 μm。，具有准确性高、操作方便快捷、可靠性好等优点，具有实际应用价值和技术借鉴意义。为激光对中仪校准及其计量性能研究提供了有效的手段，具有很高的实用价值。 |
| 英文摘要: |
| At present, the calibration method of laser centering instrument is mainly based on the cushion gauge block method, but this method has the disadvantages of complex operation, low efficiency and low reliability. In this paper, a fast calibration method of laser centering instrument is proposed, which integrates beam alignment and two-dimensional positioning error calibration, and develops the corresponding calibration device. The device uses the laser head holder to install the measured unit of the centering instrument, uses the grating type two-dimensional mobile platform to change the position of the measured unit, installs and adjusts the reference unit of the centering instrument through the three-dimensional zero return offset turntable, and uses the self-developed grating digital display meter to observe and display the X-axis and Y-axis position and status information in real-time. The measurement range of the device is 40 mm auge block methe expanded uncertainty of measurement is 3.2 μm. Iit has the advantages of high accuracy, convenient operation and good reliability. It has practical application value and technical reference significance. To solve the calibration problem of the laser alignment device, a rapid calibration method for the laser alignment device is proposed, which combines beam alignment and two-dimensional positioning error calibration. A laser alignment device has also been developed, which has a measurement range of 40mm x 40mm and an extended measurement uncertainty of 3.2μm. |
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| 中文关键词: 激光对中仪 快速校准 二维定位 光束对准 |
| 英文关键词:Laser Alignment Instrument, rapid calibration method, two-dimensional positioning method, beam alignment |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2020.06.06 |
| 引用本文：龙宽1,陈峰1,乔磊2,孙安斌2,瞿剑苏2*.激光对中仪校准装置及校准方法的研究[J].计测技术,2020,(6):. |
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