| 刮板细度计非接触测量数据处理研究 |
| The process of the Measurement Data of Non-contact Grind-Fineness-Gage Measuring-Device |
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| 中文摘要: |
| 对基于光谱共焦技术搭建的刮板细度计斜槽面深度测量装置的非接触测量数据进行算法研究。引入高斯滤波对整段测量数据进行滤波分析，再分左上平面、右上平面、斜槽底面三段进行高斯滤波，分离三个测量面的表面粗糙度信号及波纹度信号，解算出粗糙度值。对于高斯滤波中线，利用最小二乘法进行拟合，结果表明左右上平面的直线倾斜度一致，可拟合为一条直线。以再次拟合的直线为基准线，求得斜槽面扫描点至基准线的深度值，得到斜槽面深度标称值为90 μm的示值误差为0.27~1.97 μm。与电感测微仪接触测量所得数据进行比对，结果表明本文提出的刮板细度计非接触测量数据处理方法准确可靠。 |
| 英文摘要: |
| The process algorithm of the measurement data of the non-contact grind-fineness-gage measuring device based on the optical spectral confocal technology is studied. The Gauss filtering is used to filter and analyze the whole measurement data, and then the it is carried out in three sections of upper left plane, upper right plane and bottom surface of the chute. The surface roughness and waviness signals of the three measuring surfaces are separated and the roughness value is calculated. The least square method is used for fitting the Gaussian filter median line. The fitting results show the inclination of the straight line on the left and right upper planes in consistent and can be fitted into one straight line. The fitted straight line is used as the datum line, and the depth from the scanning point to the datum line is obtained, and the indicating error of the nominal value of the chute surface depth of 90μm is (0.27~1.97)μm. Compared with the contact measurement of an inductance micrometer, the results show that the data processing method for noncontact measurement is accurate and reliable. |
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| 中文关键词: 刮板细度计 光谱共焦 非接触测量 高斯滤波 最小二乘法 |
| 英文关键词:fineness of grind gage spectral confocal non-contact measurement Gaussian filtering least square method |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2021.01.05 |
| 引用本文：金挺，陈挺.刮板细度计非接触测量数据处理研究[J].计测技术,2021,(1):. |
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