| 基于锁相环的音叉式原子力显微镜测头电路系统 |
| Tuning Fork AFM Probe Circuit System Based on PLL |
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| 中文摘要: |
| 石英音叉具有谐振频率稳定、品质因素高等优点，适合用于制作原子力显微镜探针，论文分析了原子力显微镜用石英音叉探针驱动电路，包括前置放大、自激振荡和锁相环电路系统，对影响电路系统性能的器件参数进行分析，实现对石英音叉共振频率的检测及自动补偿调整，并对锁相环电路进行仿真及试验验证，试验证明电路系统满足原子力显微镜工作需求。 |
| 英文摘要: |
| Quartz tuning fork has the advantages of stable harmonic frequency and high quality factor, which is suitable for making atomic force microscope probe. In this paper, the driving circuit of quartz tuning fork probe, which includes preamplifier, self-excited oscillation and phase-locked loop (PLL) circuit system, is analyzed. The parameters of electronic devices that affect the performance of the circuit system are analyzed. In the drive circuit, the resonant frequency of quartz tuning fork can be detected and automatically compensated, and the PLL circuit is simulated and verified. The test results show that the circuit system meets the requirements of atomic force microscope. |
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| 中文关键词: 石英音叉 原子力显微镜 驱动电路 锁相环 |
| 英文关键词:quartz tuning fork atomic force microscope (AFM) drive circuit phase-locked loop(PLL). |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2021.01.09 |
| 引用本文：李暄妍1，张富强1，陈晓梅3，高超2,3.基于锁相环的音叉式原子力显微镜测头电路系统[J].计测技术,2021,(1):. |
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