| 五自由度运动误差测量系统关键技术研究 |
| Research on Key Technology of Five-degree-of-freedom Motion Error Measurement System |
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| 中文摘要: |
| 设计了一种基于激光准直原理的运动平台激光五自由度运动误差测量系统，该系统基于双平行光束的准直原理对水平直线度、垂直直线度、偏摆角、俯仰角和滚转角误差进行同步测量。进行了系统直线度、偏摆角和俯仰角误差测量核心器件参数的自标定，针对双光束难以调平影响滚转角误差测量的问题，利用水平仪对滚转角误差进行补偿修正。对整套系统进行准确度比对实验，结果表明系统所测直线度、偏摆俯仰角和滚转角误差的准确度可分别达到0.8 μm，0.8″和1.5″，为机床几何误差测量技术发展提供借鉴。 |
| 英文摘要: |
| A laser five-degree-of-freedom motion error measurement system based on the principle of laser collimation is designed. Based on the collimation principle of double parallel beams, the system measures the horizontal straightness, vertical straightness, yaw, pitch and roll angle error synchronously. The self-calibration of the core device parameters of the system's straightness, yaw and pitch angle error measurement is carried out. Aiming at the problem that the double beam is difficult to level and affects the roll angle error measurement, it is proposed to use a level to compensate and correct the roll angle error. Finally, an accuracy comparison experiment is carried out on the entire system. The results show that the accuracy of the straightness, yaw and pitch angle and roll angle measured by the system can reach 0.8μm, 0.8" and 1.5" respectively. The system provides a powerful reference for the research of machine tool geometric error measurement. |
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| 中文关键词: 五自由度误差 双光束 滚转角误差补偿修正 |
| 英文关键词:five degree of freedom error dual-beam roll angle error compensation correction |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2021.03.08 |
| 引用本文：张忠宁，宋治崑，范宇超，范光照，娄志峰.五自由度运动误差测量系统关键技术研究[J].计测技术,2021,(3):. |
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