| 高粘液体的微转印研究进展 |
| Research Progress on Micro-transferring of High-viscosity Liquid |
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| 中文摘要: |
| 异质异构零件连接是提高微小系统集成度的关键，由于采用高粘胶液进行微胶连具有无需高温高压处理、实施简单、内应力小等特点，已成为加速度计等高性能系统核心组件的重要连接方法，高粘胶液微量分配对连接性能影响显著。高粘胶管式注射体系的流阻极高，易出现流动不畅和堵塞问题，需要改变驱动方式等实现特定场合的胶液微量分配，但高粘流阻问题未从根本上解决。转印法分配液体主要依赖转印头-液体-基板表面之间的粘附作用和转印压力，消除了管内流阻制约，而且不需要很高的驱动力，这对高粘液体的微量分配是有益的。本文重点介绍高粘胶液的微转印机理，以及高粘液滴加载和液滴转印两项关键技术的研究进展，并展望了未来发展趋势。 |
| 英文摘要: |
| The connection technique of various microparts is the key to improve the microsystem integration. The adhesion connection with high-viscosity adhesive presents the advantages, including simple operation, weak internal stress, no requirement of high temperature and pressure. Thus the adhesion connection has gradually become an important bonding method for high performance microsystems. The micro-dispensing of high-viscosity liquid has significant influence on the bonding performance. Since the flow resistance of high-viscosity liquid tube injection system is very high, the improvements on driving mode etc. are necessary for the micro-dispensing of high-viscosity adhesive in specific occasions. But the problem of high flow resistance has not been completely solved. The transfer dispensing method of the liquid mainly depends on the adhesion and transfer pressure between the transfer head, liquid and substrate surface. This method eliminates the restriction of the flow resistance in the tube, and does not need the high driving force, which is beneficial to the micro-dispensing of the high-viscosity liquid. In this paper, the mechanism of high-viscosity liquid micro-transferring is introduced. And the progress on both high viscosity droplet-loading and droplet-transferring are presented. At last, the development trends are prospected. |
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| 中文关键词: 微装配 微转印 高粘胶液 非牛顿流体 |
| 英文关键词:microassembly micro-transferring high-viscosity liquid non-Newtonian fluid |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2021.05.09 |
| 引用本文：徐 征，钱艳文，秦少春，王晓东.高粘液体的微转印研究进展[J].计测技术,2021,(5):. |
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