| 气体中痕量水蒸气测量技术进展 |
| Technical progress in measurement of trace water vapor in gas |
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| 中文摘要: |
| 气体中水蒸气含量测量在工业生产和科研领域发挥至关重要的作用。随着许多工业生产和科研领域对气体水分含量更加严格的测试要求，对于气体中水蒸气含量测量灵敏度的要求也越来越高。目前测量nmol/mol痕量水分的仪器方法有可调谐二极管激光吸收光谱法、光腔衰荡光谱法、大气压离子质谱仪法；达到这个痕量水平的传感器类测量技术有石英晶体微天平法、冷镜露点法、阻容法、电解法。针对这些测量方法的优缺点以及今后的发展趋势进行了论述分析，通过克服测量过程中的干扰因素，可在一定的程度上提高痕量水含量的测量准确性，对促进痕量水含量准确测量技术的发展有所裨益。 |
| 英文摘要: |
| The measurement of water vapor in gas is very important for many industrial production and scientific research fields. With the more stringent test requirements of gas moisture content, the analysis and measurement methods are also required to be more sensitive. At present, the instrument methods for measuring nmol / mol trace water include tunable diode laser absorption spectroscopy, optical cavity ring down spectroscopy and atmospheric pressure ion mass spectrometry. In addition, the measurement techniques of sensors reaching this trace level include quartz crystal microbalance method, cold mirror dew point method, resistance capacitance method and electrolytic method. These approaches are reviewed. The advantages and disadvantages of these methods as well as the future development trends are discussed. It is pointed out that the measurement accuracy of trace moisture content can be improved to a certain extent by overcoming the interference factors in the measurement process. It is beneficial to promote the development of accurate measurement technology of trace water content. |
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| 中文关键词: 气体痕量水分 湿度测量技术 水蒸气露点温度 |
| 英文关键词:trace moisture in gas humidity measurement technology dew point temperature of water vapor |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2022.03.02 |
| 引用本文：宋巍巍, 盖文, 顾正华.气体中痕量水蒸气测量技术进展[J].计测技术,2022,(3):. |
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