| 二维并联跨尺度压电精密位移驱动平台研制 |
| Development of two-dimensional parallel cross-scale piezoelectric precision displacement driving platform |
| |
| HTML 查看全文 查看/发表评论 下载PDF阅读器 |
| 中文摘要: |
| 多自由度跨尺度精密位移驱动平台在光学计量检测、半导体制造、生物医学工程等诸多领域具有广泛的应用需求。针对串联多自由度压电驱动平台结构厚重的问题，结合压电柔性铰链机构和冲击驱动原理，研制了一款结构紧凑的二维并联跨尺度压电精密位移驱动平台。通过有限元仿真和实验测试验证其性能，结果表明：压电柔性铰链定子的静态位移为7.95 μm，固有频率为11.80 kHz。低频步进位移和高频平滑运动测试表明：原理样机的步进位移分辨力为100 nm，平滑运动速度为4.96 mm/s，负载力达到100 mN以上。原理样机基本满足多自由度跨尺度精密位移驱动的技术要求，在微纳光学检测等系统中具有良好的应用价值。 |
| 英文摘要: |
| Multi-degree-of-freedom (multi-DOF) cross-scale precision displacement driving platform has a wide range of applications in optical metrology and detection, semiconductor manufacturing, biomedical engineering, and many other fields. In view of the heavy structure of the serial multi-DOF piezoelectric driving platform, a compact two-dimensional parallel cross-scale piezoelectric precision displacement driving platform is developed, which is based on the piezoelectric flexure hinge mechanism and impact driving principle. The results of finite element simulation and experimental test show that the piezoelectric flexure hinge stator has a static displacement of 7.95 μm and a natural frequency of 11.80 kHz. The low frequency step displacement and high frequency smooth movement tests show that the principle prototype has a step displacement resolution of 100 nm and a smooth movement speed of 4.96 mm/s. The load force reaches above 100 mN. The principle prototype meets the basic technical requirements of multi-DOF cross-scale precision displacement drive, and shows good application value in micro and nano optical detection systems. |
|
| 中文关键词: 压电平台 并联机构 冲击驱动 柔性铰链 步进位移 平滑运动 |
| 英文关键词:piezoelectric platform parallel mechanism impact drive flexure hinge step displacement smooth movement |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2023.01.15 |
| 引用本文：潘成亮, 吴家豪, 张婷, 蒋衡, 李维诗, 夏豪杰.二维并联跨尺度压电精密位移驱动平台研制[J].计测技术,2023,(1):. |
| 关闭 |
