| 结构光照明层析多样性表面形貌测量 |
| Sectioned imaging of structured light illumination for surface profile measurement |
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| 中文摘要: |
| 围绕散射表面和复杂微结构表面形貌高精度测量需求，对基于结构光照明的表面形貌测量技术与系统进行了研究，设计了基于科勒照明结合数字微镜器件调制的具有良好结构光对比度和均匀性的结构光照明光学系统，提出了基于高斯曲线插值的虚拟狭缝SlitMask结构照明共焦层析算法与基于迭代高斯拟合的峰值提取重建算法，建立了结构光照明表面形貌测量系统，利用单刻线对系统进行准确性与重复性测试，结果表明相对示值误差为1.87%，重复测量结果的标准差为0.0014 μm。对玻璃多刻线样板和车削表面进行测试，验证了本系统不仅可用于反射表面的测量，还对散射表面具有较好的测量能力。 |
| 英文摘要: |
| The surface topography measurement technique and system based on structured light illumination is studied around the demand of high precision measurement of scattering surface and complex microstructure surface topography. A structured light illumination optical system with good structured light contrast and uniformity based on Kohler illumination combined with digital micromirror device (DMD) modulation is designed. A virtual slit SlitMask structured illumination confocal sectioning algorithm using Gaussian curve interpolation is proposed, and the surface topography reconstruction through iterative Gaussian fitting is achieved. A structured illumination surface topography measurement system is established and well verified by experimental tests. The accuracy and repeatability of the system are tested with a single groove specimen. The results show that the relative measurement error is 1.87%, and the standard deviation of the repeated measurement results is 0.0014 μm. Furthermore, tests on actual industrial samples such as glass multiple carved lines and turned surface prove that the system can not only be used for the measurement of reflective surfaces, but also has good measurement capability for scattered surfaces. |
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| 中文关键词: 表面形貌测量 结构光照明显微镜 光学层析 重建算法 |
| 英文关键词:surface profile measurement structured illumination microscope optical sectioning reconstruction algorithm |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2023.01.16 |
| 引用本文：叶卓杭, 柴常春, 刘晓军.结构光照明层析多样性表面形貌测量[J].计测技术,2023,(1):. |
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