| 高温环境下AT切石英谐振器振动特性分析 |
| Analysis of vibration characteristics of AT⁃cut quartz resonator in high temperature environment |
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| 中文摘要: |
| 为了研究AT切型石英晶体谐振器在不同温度环境下的振动状态，利用有限元仿真软件COMSOL Multiphysics 6.0分析了石英晶体在不同温度下沿x方向振动位移分布情况，直观地观察了寄生模态的振动位移，计算了不同温度下电极区能量占比以及品质因数，并通过实验测量了不同温度下AT切型石英晶体品质因数及温频效应。仿真结果表明，随温度变化，AT切型石英晶体表面始终存在典型的能陷效应，未加剧模态间的耦合问题。实验结果表明，AT切型石英晶体频率随温度变化趋势与理论一致，实验数据与仿真计算的品质因数随温度改变均无明显变化。研究成果证明AT切型石英晶体具有良好的热稳定性，可以作为石英晶体微天平（Quartz Crystal Microbalance， QCM）传感器在高温环境下的敏感元件，对高温环境下敏感器件的选择具有指导意义。 |
| 英文摘要: |
| In order to study the vibration state of AT?cut quartz crystal resonators under different temperature environments, the vibration displacement distribution of quartz crystals along the x direction at different temperatures was analyzed using the finite element simulation software COMSOL Multiphysics 6.0. The vibration displacement of parasitic modes was visually observed and the energy ratio and quality factor of electrode region at different temperatures were calculated. The quality factor and temperature frequency effect of AT?cut quartz crystal at different temperatures were measured experimentally. The simulation results show that the typical energy trapping effect always exists on the surface of AT?cut quartz crystal with the change of temperature, and the coupling between modes is not aggravated. The experimental results show that the variation trend of AT?cut quartz crystal frequency with temperature is consistent with the theory, and the experimental data and the quality factor calculated by simulation have no obvious change with temperature. The research results show that AT?cut quartz crystal has good thermal stability and can be used as the sensitive element of Quartz Crystal Microbalance (QCM) sensor in high temperature environment, which has guiding significance for the selection of sensitive devices in high temperature environment. |
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| 中文关键词: 振动特性 AT切型 石英晶体谐振器 高温 COMSOL |
| 英文关键词:vibration characteristics AT⁃cut quartz crystal resonators high temperature COMSOL |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2023.05.11 |
| 引用本文：温连鹏, 崔健敏, 冯俊一, 刘曦, 王国华, 聂晶.高温环境下AT切石英谐振器振动特性分析[J].计测技术,2023,(5):. |
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