| 多自由度压电纳米定位平台控制技术研究现状 |
| Research status of control technologies for multi⁃DOF piezoelectric nano⁃positioning platform |
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| 中文摘要: |
| 介绍了压电驱动的工作原理、压电材料的非线性特性以及压电定位平台的直接驱动方式，分别阐述了串联、并联和串并联三种驱动方案的多自由度压电定位平台的结构设计以及解耦优化方式。重点分析了多自由度纳米压电定位平台控制系统需要解决的压电驱动器的非线性特性、交叉耦合等问题，提出应根据多自由度压电定位平台不同的结构和运动形式选定合适的控制策略。最后总结了适用于多自由度压电定位平台的控制算法，有助于研究者了解压电纳米定位平台领域的最新进展，为压电纳米定位平台控制技术研究提供借鉴。 |
| 英文摘要: |
| This paper makes a concise overview of the working principle of piezoelectric drive, the nonlinearity characteristics of the piezoelectric materials, and the direct driving method of piezoelectric positioning platforms. It summarizes the structural design and decoupling optimization methods of multi?degree?of?freedom piezoelectric positioning platforms based on three driving schemes: series, parallel, and series?parallel. It focuses on the analysis of the cross?coupling and the nonlinear characteristics of the piezoelectric driver that need to be addressed in the control system of multi?degree?of?freedom nano piezoelectric positioning platforms. It is proposed that appropriate control strategies should be selected according to the different structures and motion modes of multi?degree?of?freedom piezoelectric positioning platforms. Finally, it summarizes the control algorithms suitable for multi?degree?of?freedom piezoelectric positioning platforms. It is helpful for researchers to understand the latest developments in the field of piezoelectric nano positioning platforms and serves as a valuable reference for research on control technology for piezoelectric nano positioning platforms. |
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| 中文关键词: 纳米定位 多自由度压电驱动 先进控制技术 控制策略 压电驱动器 |
| 英文关键词:nano positioning multi⁃DOF piezoelectric drive advanced control technology control strategy piezoelectric actuators |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2023.06.01 |
| 引用本文：齐思宁, 李强.多自由度压电纳米定位平台控制技术研究现状[J].计测技术,2023,(6):. |
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