| 光学面形绝对检测方法发展综述 |
| Review on the development of optical surface absolute detection methods |
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| 中文摘要: |
| 详细介绍了三平（球）面互检法、双球面法、旋转平均法、平移差分法（伪剪切干涉法）、奇偶函数
法、随机球法和旋转平移法等光学面形绝对检测方法的测量原理，针对不同方法简述了国内外绝对检测技术的
发展动态，并对比了不同绝对检测方法的适用领域以及存在相应的技术限制。从物理实现和算法两方面对绝对
检测技术的未来发展趋势进行展望，提出了通过提高外部机械结构精度来增加面型绝对检测精度，分析了深度
神经网络算法与计算光学成像技术两种方法在绝对检测过程中的优势，并提出通过将两种方法与绝对检测技术
相结合可进一步提高光学面形的绝对检测精度，为绝对检测相关领域的研究提供有益参考。 |
| 英文摘要: |
| This paper makes a detailed introduction to the measurement principles of the optical surface absolute de?
tection methods such as three?plane (spherical) mutual detection method, bispherical method, rotating average method,
translational difference method (pseudo?shear interference method), parity function method, random ball method and rota?
tion?translational method. It also describes the development status of absolute detection methods at home and abroad, and
discusses the application fields of each absolute detection method and the corresponding technical limitations by compari?
son. Then it makes prospects to the future trends of absolute detection technology from both physical implementation and
algorithmic perspectives and proposes to increase the absolute detection accuracy of surface shape by improving the accu?
racy of external mechanical structure. Finally, it analyzes the advantages of deep neural network algorithm and computa?
tional optical imaging technology in the absolute detection process, and proposes that the absolute detection accuracy of
optical surface shape can be further improved by combining the two technologies with the absolute detection methods. It
can provide a useful reference for the research of absolute detection. |
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| 中文关键词: 光学测量 绝对检测 面形精度 |
| 英文关键词:optical measurement absolute detection surface accuracy |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2024.02.01 |
| 引用本文：胡源,侯禛敏*,蒋红梅.光学面形绝对检测方法发展综述[J].计测技术,2024,(2):. |
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