| ITO⁃Pt柔性薄膜热电偶的制备及其热电性能优化 |
| Preparation of ITO⁃Pt flexible thin film thermocouples and optimization of their thermoelectric properties |
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| 中文摘要: |
| 为解决柔性薄膜温度传感器易变形损坏失效、测试灵敏度低等问题，建立了传感器模型，开展了柔性薄膜热电偶的热?电?力多场耦合仿真计算。根据结果优化传感器结构尺寸，提出了热处理优化传感器灵敏度的工艺方法，制备出基于柔性聚酰亚胺基底的高可靠性、高灵敏度的热电式氧化铟锡?铂薄膜温度传感器。经标定测试实验证明：传感器灵敏度达40.10 μV / ℃，能够有效满足人体穿戴设备、锂电池健康监测的温度测试需求。 |
| 英文摘要: |
| In order to solve the problems of deformation failure and low sensitivity of flexible thin?film thermocouples, a thermoelectric sensing model was established and thermal?electrical?force multi?field coupling simulations of flexible thin?film thermocouples were performed. Based on the results, the structural dimensions of the sensor were optimized, and a process method for optimizing the sensitivity by heat treatment was proposed, so as to prepare a thermoelectric Indium Tin Oxide?Platinum (ITO?Pt) thin?film temperature sensor based on polyimide substrate with high reliability and high sensitivity. The calibration test experiment proves that the sensor sensitivity reaches 40.10 μV / ℃, which can effectively meet the temperature testing requirements of human wearable devices and lithium battery health monitoring. |
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| 中文关键词: 温度传感器 柔性器件 薄膜热电偶 热处理 灵敏度 |
| 英文关键词:temperature sensors flexible devices thin film thermocouples heat treatment sensitivity |
| 基金项目: |
| DOI：10.11823/j.issn.1674-5795.2024.05.05 |
| 引用本文：黄明镜, 刘兆钧, 李杨, 郭子隽, 张仲恺, 田边.ITO⁃Pt柔性薄膜热电偶的制备及其热电性能优化[J].计测技术,2024,44(5):. |
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