| 利特罗型光栅干涉仪的元件定位误差分析 |
| Element positioning error analysis of a Litro grating interferometer |
| 投稿时间：2025-01-06 修订日期：2025-02-09 |
| HTML 查看/发表评论 下载PDF阅读器 |
| 中文摘要: |
| 对一种利特罗型光栅干涉仪进行误差研究分析。对由元件定位精度引起的干涉仪系统误差，即光栅绕X，Y，Z轴以及反射镜绕Y轴旋转时所造成的影响进行了定量分析,建立光栅及反射镜相关误差的数学模型，结果表明：光栅及反射镜绕X,Z轴旋转不会产生额外光程差，但会影响干涉光斑的重合度导致信噪比下降。光栅绕Y轴旋转会造成两边光路的不对称，出现额外光程差从而导致测量误差，随着光栅常数和旋转角度的增大，测量误差的变化会加大。而反射镜绕Y轴旋转时，当两反射镜的旋转角度正负相反，两光路仍然对称无误差，只有当两反射镜的旋转角度不同时才有误差产生，且误差与两反射镜的旋转角度之差有关，差距越大误差越大。使用误差合成公式对整个系统进行误差合成，得到在高精度的装配级别下，系统误差为±3.12微米；在一般精度的级别下，系统误差为±17.75微米。通过实验验证了理论仿真的正确性，该结论对利特罗型光栅干涉仪的优化设计提供了技术参考。 |
| 英文摘要: |
| The error study and analysis of a Litro grating interferometer were carried out.The systematic error of the interferometer caused by the positioning accuracy of the element, that is, the influence of the grating around the X, Y, and Z axes and the rotation of the mirror around the Y-axis is quantitatively analyzed, and the mathematical model of the correlation error of the grating and the mirror is established.The rotation of the grating around the Y axis causes asymmetry in the optical path on both sides, resulting in additional optical path differences resulting in measurement errors, which increase as the grating constant and rotation angle increase. When the mirror rotates around the Y axis, when the rotation angle of the two mirrors is positively or negative, the two optical paths are still symmetrical and error-free, and the error is only generated when the rotation angles of the two mirrors are different, and the error is related to the difference between the rotation angles of the two mirrors, and the larger the difference, the greater the error. The error synthesis formula is used to synthesize the error of the whole system, and the systematic error is ±3.12 microns at the high-precision assembly level. At the level of general accuracy, the systematic error is ±17.75 microns.The correctness of the theoretical simulation is verified by experiments, and the conclusion provides a technical reference for the optimal design of Litro grating interferometer. |
|
| 中文关键词: 光栅干涉仪；利特罗型；误差分析；光程差 精密位移测量 |
| 英文关键词:grating interferometer litro type error analysis optical path difference precise displacement measurements |
| 基金项目:吉林省自然科学基金（20240101360JC） |
| DOI： |
| 引用本文： |
| 关闭 |
|
|
|
